The study of new vacuum pressure measurement technique using ultrasonic acoustic impedance transducers

Ultrasonic sensors of 500 kHz frequency have been used to study the measuring of gas pressure in the range 1.33 x 10(3)-2.026 x 10(5) Pa. From the experimental data it was observed that amplitude of the transmitted ultrasound was dependent on gas pressure. The results confirm that by using appropriate instruments including sensors and electronic devices, pressure of the gas can be successfully measured by measuring the magnitude of the received signal. The proposed method is expected to be applied to develop as new vacuum pressure measurement instrument. (C) 2011 American Institute of Physics. [doi:10.1063/1.3615310]