A van der Waals Synaptic Transistor Based on Ferroelectric Hf0.5Zr0.5O2 and 2D Tungsten Disulfide

被引:82
|
作者
Chen Li [1 ,2 ]
Wang Lin [1 ,2 ]
Peng Yue [3 ]
Feng Xuewei [1 ,2 ]
Sarkar, Soumya [4 ]
Li Sifan [1 ,2 ]
Li Bochang [1 ,2 ]
Liu Liang [5 ]
Han Kaizhen [1 ]
Gong Xiao [1 ]
Chen Jingsheng [5 ]
Liu Yan [3 ]
Han Genquan [3 ]
Ang, Kah-Wee [1 ,2 ]
机构
[1] Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 117583, Singapore
[2] Natl Univ Singapore, Ctr Adv 2D Mat, 6 Sci Dr 2, Singapore 117546, Singapore
[3] Xidian Univ, State Key Discipline Lab Wide Band Gap Semicond T, 2 Taibai South Rd, Xian 710071, Shaanxi, Peoples R China
[4] Natl Univ Singapore, NUSNNI NanoCore, T Lab Bldg,5A Engn Dr 1, Singapore 117411, Singapore
[5] Natl Univ Singapore, Dept Mat Sci & Engn, 9 Engn Dr 1, Singapore 117575, Singapore
基金
新加坡国家研究基金会;
关键词
ferroelectric gate stacks; HZO; synaptic transistors; van der Waals; WS; (2); DEVICE; NEUROTRANSMITTER; FUNCTIONALITY; SYNAPSES; FILMS;
D O I
10.1002/aelm.202000057
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Neuromorphic computing on the hardware level is promising for performing ever-increasing data-centric tasks owing to its superiority to conventional von Neumann architecture in terms of energy efficiency and learning ability. One key aspect to its implementation is the development of artificial synapses that can effectively emulate the multiple functionalities exhibited by their biological counterparts. Here, building on an inorganic ferroelectric gate stack integrated with a 2D layered semiconductor (WS2), a new type of ferroelectricity-based synaptic transistor that differs from those relying on interface traps or floating gate configuration is reported. By virtue of a 6 nm thick ferroelectric hafnium zirconium oxide by atomic layer deposition and postannealing treatment, the device shows a channel resistance change ratio above 10(5) corresponding to opposite ferroelectric polarization direction. Furthermore, by applying electrical stimulus to the gate, it demonstrates good capability to mimic various synaptic behaviors including long-term potentiation, long-term depression, spike-amplitude-dependent plasticity, and spike-rate-dependent plasticity. Given the inherent compatibility of the ferroelectric gate stack with existing fabrication technology, and the reliability of ferroelectricity engineering, this work paves the way toward practical implementation of synaptic devices in neuromorphic circuits.
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页数:9
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