Adaptive high precision control for piezo-actuated nano-positioner

被引：0
|
作者：
Ozaki, Toshikuni [1 ]
Chen, Xinkai [2 ]
机构：
[1] Shibaura Inst Technol, Grad Sch, Minuma Ku, 307 Fukasaku, Saitama 3378570, Japan
[2] Shibaura Inst Technol, Dept Elect Informat Syst, Minuma Ku, Saitama 3378570, Japan
来源：
2010 IEEE INTERNATIONAL SYMPOSIUM ON INTELLIGENT CONTROL | 2010年
关键词：
VIBRATION COMPENSATION; SPECIAL-ISSUE; HYSTERESIS; IDENTIFICATION; DYNAMICS; SYSTEMS; CREEP;
D O I：
10.1109/ISIC.2010.5612884
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
引用
收藏
页码：2278 / 2283
页数：6
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