Thermal stability of CrAlN/AlCrN nanolaminate coating deposited by hybrid dcMS/HPPMS after heat treatment with continuous-wave laser

被引：4
|
作者：
Bobzin, K. [1 ]
Broegelmann, T. [1 ]
Mayer, J. [2 ]
Aretz, A. [2 ]
Iskandar, M. R. [2 ,3 ]
Kruppe, N. C. [1 ]
Naderi, M. [1 ]
机构：
[1] Rhein Westfal TH Aachen, Surface Engn Inst, Kackertstr 15, D-52072 Aachen, Germany
[2] Rhein Westfal TH Aachen, Cent Facil Electron Microscopy, Ahornstr 55, D-52074 Aachen, Germany
[3] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electrons, Leo Brandt Str 1, D-52428 Julich, Germany
来源：
APPLIED SURFACE SCIENCE | 2021年 / 569卷
关键词：
OXIDATION BEHAVIOR; HARD COATINGS; CUBIC ALN; THICKNESS; NITRIDE; TOOLS;
D O I：
10.1016/j.apsusc.2021.151024
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Nanolaminate coatings consisting of hundreds of alternating CrN and AlN nanolayers can be used as protective coatings on various manufacturing technology tools. In this work, a coating is investigated, which is deposited using a hybrid direct current and high power pulse magnetron sputtering technology. The coating exhibits a nanolaminate architecture and its nanolayers consist of cubic CrAlN and AlCrN ternary solid solution phases. In order to study the thermal stability especially in the near-surface area of the coating, it is heat treated by using a continuous-wave laser at two different laser power densities. Laser induced heat-affected zone as well as punctual Al-rich precipitates, which are formed at the interface between the Al-rich AlCrN nanolayers and the column boundaries, are investigated using transmission electron microscopy. Moreover, it is demonstrated that the indentation hardness and indentation modulus of the coating are affected only to a small extent by the continuous-wave laser heat treatment.
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页数：14
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