A high-resolution fiber optic accelerometer based on intracavity phase-generated carrier (PGC) modulation

被引：57
作者：
Lin, Qiao [1 ]
Chen, Liuhua [1 ]
Li, Shu [1 ]
Wu, X. [1 ]
机构：
[1] Zhejiang Univ, Dept Opt Engn, Hangzhou 310027, Peoples R China
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2011年 / 22卷 / 01期
关键词：
fiber optic accelerometer; phase-generated carrier (PGC); acceleration responsivity; resonance frequency; resolution;
D O I：
10.1088/0957-0233/22/1/015303
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A compact-size fiber optic accelerometer was designed to achieve both high resolution and wide dynamic range concurrently. An optical cavity, with its length modulated by a piezoelectric oscillator at audio frequency, is utilized to resolve the nanometer-level displacement of a silicon micro-mirror which serves as an inertial mass for acceleration sensing. Strain analysis of the proof-mass flexure structure by Cosmosworks was carried out to calculate responsivity and resonance frequency for a comparison with experimental measurement. The responsivity below the structural resonance frequency of 160 Hz reaches 36 dB re 1 rad/g. Performance measurement demonstrated that the accelerometer was able to resolve an acceleration of 48 ng Hz(-1/2) with a dynamic range of 2 x 10(7).
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页数：6
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