A 1.2-V 10-μW NPN-Based Temperature Sensor in 65-nm CMOS With an Inaccuracy of 0.2 °C (3σ) From -70 °C to 125 °C

被引:67
|
作者
Sebastiano, Fabio [1 ]
Breems, Lucien J. [1 ]
Makinwa, Kofi A. A. [2 ]
Drago, Salvatore [1 ]
Leenaerts, Domine M. W. [1 ]
Nauta, Bram [3 ]
机构
[1] NXP Semicond, Eindhoven, Netherlands
[2] Delft Univ Technol, Elect Instrumentat Lab, Delft, Netherlands
[3] Univ Twente, IC Design Grp, CTIT Res Inst, NL-7500 AE Enschede, Netherlands
关键词
CMOS analog integrated circuits; sigma-delta modulation; smart sensors; temperature sensors; COMPENSATION;
D O I
10.1109/JSSC.2010.2076610
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An NPN-based temperature sensor with digital output has been realized in a 65-nm CMOS process. It achieves a batch-calibrated inaccuracy of +/-0.5 degrees C (3 sigma) and a trimmed inaccuracy of +/-0.2 degrees C (3 sigma) over the temperature range from -70 degrees C to 125 degrees C. This performance is obtained by the use of NPN transistors as sensing elements, the use of dynamic techniques, i.e., correlated double sampling and dynamic element matching, and a single room-temperature trim. The sensor draws 8.3 mu A from a 1.2-V supply and occupies an area of 0.1 mm(2).
引用
收藏
页码:2591 / 2601
页数:11
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