Optical coherence tomography for shape and radius of curvature measurements of deeply curved machined metallic surfaces: a comparison with two-beam laser interferometry

被引：15

作者：

Rao, K. Divakar ^{[1
]}

Udupa, D. V. ^{[2
]}

Prathap, C. ^{[1
]}

Rathod, A. ^{[3
]}

Balasubramaniam, R. ^{[3
]}

Sahoo, N. K. ^{[2
]}

机构：

[1] Bhabha Atom Res Ctr Facil, Photon & Nanotechnol Sect, Visakhapatnam 530012, Andhra Pradesh, India

[2] Bhabha Atom Res Ctr, Atom & Mol Phys Div, Bombay 400085, Maharashtra, India

[3] Bhabha Atom Res Ctr, Div Precis Engn, Bombay 400085, Maharashtra, India

来源：

OPTICS AND LASERS IN ENGINEERING | 2015年 / 66卷

关键词：

Optical coherence tomography; Radius of curvature; Fizeau interferometry; Curved surfaces;

D O I：

10.1016/j.optlaseng.2014.09.012

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An application of optical coherence tomography (OCT) for measuring shape and the radius of curvature of deeply curved metallic surfaces in precision mechanical components is demonstrated. Measurements carried out by OCT technique on concave and convex hemispherical metallic surfaces generated by diamond turning process is presented. The technique is compared with a two-beam laser interferometric method for determinations of shape errors and radius of curvature. It is shown that OCT is a useful tool for three-dimensional shape determinations for deeply curved surfaces such as hemispheres and has advantages over two-beam laser interferometric method. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：204 / 209

页数：6