Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

被引：84

作者：

Muhammad, H. B. ^{[1
]}

Oddo, C. M. ^{[2
]}

Beccai, L.

Recchiuto, C. ^{[2
]}

Anthony, C. J. ^{[1
]}

Adams, M. J. ^{[1
]}

Carrozza, M. C. ^{[2
]}

Hukins, D. W. L. ^{[1
]}

Ward, M. C. L. ^{[1
]}

机构：

[1] Univ Birmingham, Sch Mech Engn, Biomed & Micro Engn Res Ctr, Birmingham B15 2TT, W Midlands, England

[2] Polo SantAnna Valdera Scuola Super SantAnna, Adv Robot Technol & Syst Lab, I-56025 Pisa, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 02期

关键词：

MEMS; Tactile sensor; Biomimetic; Capacitive sensor; RAPIDLY ADAPTING MECHANORECEPTORS; FORCE SENSOR; HUMAN HAND; SILICON; TECHNOLOGY; RESPONSES;

D O I：

10.1016/j.sna.2010.10.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load-unload indentation cycles. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：221 / 229

页数：9

共 41 条

[1] Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications [J].