The Glass-Molding Process for Planar-Integrated Micro-Optical Component

被引：7
|
作者：
Huang, Chien-Yao [1 ,2 ]
Sze, Jyh-Rou [1 ]
Huang, Kuo-Cheng [1 ]
Kuo, Chao-Hui [1 ]
Tseng, Shih-Feng [1 ,2 ]
Chou, Chang-Pin [2 ]
机构：
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 300, Taiwan
[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 300, Taiwan
来源：
OPTICAL REVIEW | 2011年 / 18卷 / 01期
关键词：
precision glass-molding technology (PGMT); planar-integrated micro-optical component (PIMOC); FABRICATION; LENSES;
D O I：
10.1007/s10043-011-0039-6
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 degrees C and a cooling rate of 49 degrees C/min. (C) 2011 The Japan Society of Applied Physics
引用
收藏
页码：96 / 98
页数：3
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