The Glass-Molding Process for Planar-Integrated Micro-Optical Component

被引：7
|
作者：
Huang, Chien-Yao [1 ,2 ]
Sze, Jyh-Rou [1 ]
Huang, Kuo-Cheng [1 ]
Kuo, Chao-Hui [1 ]
Tseng, Shih-Feng [1 ,2 ]
Chou, Chang-Pin [2 ]
机构：
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 300, Taiwan
[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 300, Taiwan
来源：
OPTICAL REVIEW | 2011年 / 18卷 / 01期
关键词：
precision glass-molding technology (PGMT); planar-integrated micro-optical component (PIMOC); FABRICATION; LENSES;
D O I：
10.1007/s10043-011-0039-6
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 degrees C and a cooling rate of 49 degrees C/min. (C) 2011 The Japan Society of Applied Physics
引用
收藏
页码：96 / 98
页数：3
相关论文
共 50 条
  • [1] The glass-molding process for planar-integrated micro-optical component
    Chien-Yao Huang
    Jyh-Rou Sze
    Kuo-Cheng Huang
    Chao-Hui Kuo
    Shih-Feng Tseng
    Chang-Pin Chou
    Optical Review, 2011, 18 : 96 - 98
  • [2] All-reflective planar-integrated free-space micro-optical femtosecond pulse shaper
    Jahns, Juergen
    Knuppertz, Hans
    Bohling, Michael
    OPTICAL ENGINEERING, 2009, 48 (12)
  • [3] Glass biochip fabrication by laser micromachining and glass-molding process
    Huang, Chien-Yao
    Kuo, Chao-Hui
    Hsiao, Wen-Tse
    Huang, Kuo-Cheng
    Tseng, Shih-Feng
    Chou, Chang-Pin
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2012, 212 (03) : 633 - 639
  • [4] Replication of micro-optical components by ultraviolet-molding process
    Kim, SM
    Kim, DM
    Kang, SN
    JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2003, 2 (04): : 356 - 359
  • [5] Replication of micro-optical components by UV-molding process
    Kim, S
    Kim, D
    Kang, S
    Ahn, S
    MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS, 2003, 4984 : 63 - 69
  • [6] Imaging properties of planar-integrated micro-optics
    Testorf, M
    Jahns, J
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1999, 16 (05): : 1175 - 1183
  • [7] Planar-Integrated Magneto-Optical Trap
    Chen, Liang
    Huang, Chang-Jiang
    Xu, Xin-Biao
    Zhang, Yi-Chen
    Ma, Dong-Qi
    Lu, Zheng-Tian
    Wang, Zhu-Bo
    Chen, Guang-Jie
    Zhang, Ji-Zhe
    Tang, Hong X.
    Dong, Chun-Hua
    Liu, Wen
    Xiang, Guo-Yong
    Guo, Guang-Can
    Zou, Chang-Ling
    PHYSICAL REVIEW APPLIED, 2022, 17 (03)
  • [8] Integrated micro-optical systems
    Kathman, A
    MICRO-OPTICS INTEGRATION AND ASSEMBLIES, 1998, 3289 : 13 - 21
  • [9] Recent progress in hybrid glass materials for micro-optical component fabrication
    Kärkkäinen, AHO
    Rogers, JD
    Jabbour, GE
    Rantala, JT
    Descour, MR
    MICRO- AND NANO-OPTICS FOR OPTICAL INTERCONNECTION AND INFORMATION PROCESSING, 2001, 4455 : 15 - 22
  • [10] LOGIC MODULES FOR ADVANCED GLASS-MOLDING PROCESS-CONTROL
    BRIGGS, A
    WORMSTONE, RJ
    CONTROL AND INSTRUMENTATION, 1973, 5 (05): : 44 - 45
12345