Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

被引：4

作者：

Lee, Byoung-Min ^{[1
]}

Nam, Hui-Gyun ^{[1
]}

Choi, Hyeong Yeol ^{[2
]}

Hong, Sung-Kwon ^{[1
]}

Jeong, Young Gyu ^{[2
]}

Choi, Jae-Hak ^{[1
]}

机构：

[1] Chungnam Natl Univ, Dept Polymer Sci & Engn, 99 Daehak Ro, Daejeon 34134, South Korea

[2] Chungnam Natl Univ, Dept Adv Organ Mat & Text Syst Engn, 99 Daehak Ro, Daejeon 34134, South Korea

来源：

CARBON LETTERS | 2020年 / 30卷 / 06期

关键词：

SU-8; photoresist; Deep UV; Electric heater; Carbonization; Carbon thin film; BLACK COMPOSITES; FABRICATION; NETWORK; DRY;

D O I：

10.1007/s42823-020-00129-x

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report the structural characterization and electric heating performance of carbon thin films (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 degrees C and a rapid heating rate of 13.2 degrees C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.

引用

页码：595 / 601

页数：7

共 5 条

[1] Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization
Byoung-Min Lee
Hui-Gyun Nam
Hyeong Yeol Choi
Sung-Kwon Hong
Young Gyu Jeong
Jae-Hak Choi
Carbon Letters, 2020, 30 : 595 - 601
[2] Shrinkage Analysis of Carbon Micro Structures Derived from SU-8 Photoresist
Natu, R.
Islam, M.
Martinez-Duarte, R.
ENGINEERING CARBON HYBRIDS - CARBON ELECTRONICS 2, 2016, 72 (01): : 27 - 33
[3] Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications
Kandpal, Manoj
Sharan, Chandrashekhar
Poddar, Pankaj
Prashanthi, K.
Apte, Prakash R.
Rao, V. Ramgopal
APPLIED PHYSICS LETTERS, 2012, 101 (10)
[4] Fabrication and electric heating behavior of carbon thin films from water-soluble poly(vinyl alcohol) via simple dry and ambient stabilization and carbonization
Lee, Byoung-Min
Jung, Jin-Mook
Hwang, In-Tae
Shin, Junhwa
Hong, Sung-Kwon
Jung, Chan-Hee
Jeong, Young Gyu
Choi, Jae-Hak
APPLIED SURFACE SCIENCE, 2018, 456 : 561 - 567
[5] Carbon nanotube/polyimide bilayer thin films with high structural stability, optical transparency, and electric heating performance
Kim, Young Ju
Yu, Seong Jun
Jeong, Young Gyu
RSC ADVANCES, 2016, 6 (36): : 30106 - 30114

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