Laser confocal radius measurement method for unpolished spheres

被引：1

作者：

Wang, Xu ^{[1
]}

Zhao, Weiqian ^{[2
]}

Qiu, Lirong ^{[2
]}

Yang, Shuai ^{[2
]}

Wang, Zhongyu ^{[1
]}

机构：

[1] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China

[2] Beijing Inst Technol, Sch Optoelect, Beijing Key Lab Precis Optoelect Measurement Inst, Beijing 100081, Peoples R China

来源：

APPLIED OPTICS | 2016年 / 55卷 / 17期

基金：

中国国家自然科学基金;

关键词：

INTERFEROMETRY;

D O I：

10.1364/AO.55.004558

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A laser confocal radius measurement method for unpolished spheres (CRMUS) is proposed for measuring the radius of an unpolished sphere during optical sphere processing. CRMUS uses the laser confocal focusing technique to accurately identify the cat's eye and confocal positions of the unpolished sphere, and then uses the distance between the cat's eye and confocal positions measured by a distance measurement interferometer to derive the radius. The partially coherent optical theoretical model of the CRMUS derived indicates that the CRMUS is able to measure the radius of the unpolished sphere with a roughness of less than 0.15 mu m. Using an unpolished sphere made of Schott BK7 as the test sphere, experimental results indicate that the CRMUS has a relative expanded uncertainty of less than 20 ppm. The CRMUS could greatly increase processing efficiency. (C) 2016 Optical Society of America

引用

页码：4558 / 4563

页数：6

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