共 50 条
- [1] Micro-machined condenser microphone with polysilicon diaphragm Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, 16 (14): : 1243 - 1247
- [2] Polysilicon surface micro-machined spatial light modulator with novel electronic integration DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002, 2002, 4755 : 477 - 484
- [3] Large-scale polysilicon surface micro-machined spatial light modulator MOEMS AND MINATURIZED SYSTEMS III, 2003, 4983 : 204 - 210
- [4] Micro-machined Pendulum and Non-driven Micro-machined Gyroscope 2011 INTERNATIONAL CONFERENCE ON PHYSICS SCIENCE AND TECHNOLOGY (ICPST), 2011, 22 : 517 - 523
- [6] Advanced Characterization Of Carrier Profiles In Germanium Using Micro-Machined Contact Probes ION IMPLANTATION TECHNOLOGY 2012, 2012, 1496 : 167 - 170
- [8] A micro-machined loudspeaker for the hearing impaired TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 429 - 432
- [9] Micro-machined vibrating ring gyroscope Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2009, 17 (06): : 1344 - 1349