Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer

被引：20
作者：
Holmes, Christopher [1 ]
Gates, James C. [1 ]
Smith, Peter G. R. [1 ]
机构：
[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
来源：
OPTICS EXPRESS | 2014年 / 22卷 / 26期
基金：
英国工程与自然科学研究理事会;
关键词：
SILVER-COATED FIBER; WAVE-GUIDES; SILICON; BIREFRINGENCE;
D O I：
10.1364/OE.22.032150
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper reports for the first time a planarised optical fiber composite formed using Flame Hydrolysis Deposition (FHD). As a way of format demonstration a Micro-Opto-Electro-Mechanical (MOEMS) hot wire anemometer is formed using micro-fabrication processing. The planarised device is rigidly secured to a silicon wafer using optical quality doped silica that has been deposited using flame hydrolysis and consolidated at high temperature. The resulting structure can withstand temperatures exceeding 580K and is sensitive enough to resolve free and forced convection interactions at low fluid velocity. (c) 2014 Optical Society of America
引用
收藏
页码：32150 / 32157
页数：8
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