A new comprehensive measuring and analyzing system for form and surface topography

被引：0
|
作者：
Xiao, SJ [1 ]
Jiang, XQ [1 ]
Xie, TB [1 ]
Li, Z [1 ]
机构：
[1] Huazhong Univ Sci & Technol, Res Ctr Measurement Technol & Sci Instruments, Wuhan 430074, Hubei, Peoples R China
来源：
PROCEEDINGS OF: ADVANCES IN SURFACE METROLOGY | 1997年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The sensor for measuring the form and surface topography, especially for precision curved surface, must has the character of wider dynamical measuring range and higher resolution in the meantime. A small-sized stylus-grating sensor, which using a Reflection Cylindrical Hologram Diffraction (RCHD) grating and a laser diode, is improved on the authors' previous researches. The sensor's measuring range is 6mm, and its resolution is 1nm. The sensor is used successfully in the comprehensive measuring and analyzing system for form and surface topography.
引用
收藏
页码：42 / 45
页数：4
相关论文
共 50 条
  • [41] New methodologies for measuring film thickness, coverage, and topography
    Mate, CM
    Yen, BK
    Miller, DC
    Toney, MF
    Scarpulla, M
    Frommer, JE
    IEEE TRANSACTIONS ON MAGNETICS, 2000, 36 (01) : 110 - 114
  • [42] Ellipso-Height-Topometry A new method for measuring surface topography, layer thickness, and for material recognition
    Leonhardt, Klaus
    Breitmeier, Ulrich
    TM-TECHNISCHES MESSEN, 2016, 83 (01) : 53 - 61
  • [43] Study of measuring surface topography of grinding wheel on the machine (1st report). Development of measuring system using a laser stylus
    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1997, 63 (02): : 228 - 232
  • [44] Method for measuring free-form surface by measuring coordinate of point
    Xu, Y.C.
    Xie, Z.X.
    Feng, G.X.
    Wang, C.H.
    Zhang, G.X.
    Gaojishu Tongxin/High Technology Letters, 2001, 11 (08):
  • [45] MICROPROCESSOR CONTROLLED MEASURING SYSTEM FOR COMBUSTION EFFICIENCY ANALYZING
    GREISER, P
    TECHNISCHES MESSEN, 1987, 54 (11): : 430 - 432
  • [46] Analyzing Biosimilars in Brazil: Comprehensive Specifications of the Regulatory System
    Deeksha, Kethareshwara Sujatha
    Veeranna, Balamuralidhara
    Ravindra, Gowthami Kodlahalli
    INDIAN JOURNAL OF PHARMACEUTICAL EDUCATION AND RESEARCH, 2023, 57 (03) : S499 - S506
  • [47] Analyzing form and measuring perceptual content in Mozart's Sonata K.282: A new theory of parametric analogues
    Narmour, E
    MUSIC PERCEPTION, 1996, 13 (03): : 265 - 318
  • [48] Analyzing the Surface Topography of Hafnium Nitride Coating on Titanium Screws: An In Vitro Analysis
    Jose, Shilpa M.
    Rajaraman, Vaishnavi
    Ariga, Padma
    Ganapathy, Dhanraj
    Sekaran, Saravanan
    CUREUS JOURNAL OF MEDICAL SCIENCE, 2024, 16 (04)
  • [49] Analyzing and measuring the surface temperature of Qinghai-Tibet Plateau
    Jiang, H
    Cheng, GD
    Wang, KL
    CHINESE JOURNAL OF GEOPHYSICS-CHINESE EDITION, 2006, 49 (02): : 391 - 397
  • [50] NEW TECHNIQUES FOR MEASURING, ANALYZING, AND REPORTING SOCIAL CHANGE
    LUBELL, S
    PUBLIC OPINION QUARTERLY, 1968, 32 (03) : 478 - 479
12345