A new comprehensive measuring and analyzing system for form and surface topography

被引：0
|
作者：
Xiao, SJ [1 ]
Jiang, XQ [1 ]
Xie, TB [1 ]
Li, Z [1 ]
机构：
[1] Huazhong Univ Sci & Technol, Res Ctr Measurement Technol & Sci Instruments, Wuhan 430074, Hubei, Peoples R China
来源：
PROCEEDINGS OF: ADVANCES IN SURFACE METROLOGY | 1997年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The sensor for measuring the form and surface topography, especially for precision curved surface, must has the character of wider dynamical measuring range and higher resolution in the meantime. A small-sized stylus-grating sensor, which using a Reflection Cylindrical Hologram Diffraction (RCHD) grating and a laser diode, is improved on the authors' previous researches. The sensor's measuring range is 6mm, and its resolution is 1nm. The sensor is used successfully in the comprehensive measuring and analyzing system for form and surface topography.
引用
收藏
页码：42 / 45
页数：4
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