A comparison of three low dielectric constant organic polymers

被引：0
|
作者：
Case, CB
Case, CJ
Kornblit, A
Mills, ME
Castillo, D
Liu, R
机构：
来源：
LOW-DIELECTRIC CONSTANT MATERIALS II | 1997年 / 443卷
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Three low dielectric constant organic polymers are being investigated for possible use in a conventional, subtractive etch, multi-level metal process with PVD Al plugs. Material properties, physical properties, planarization ability and etch chemistries are compared, as well as the possibility of using these materials in a low temperature PVD Al plug process.
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页码：177 / 182
页数：6
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