Design and construction of a high-resolution 3D translation stage for metrological applications

被引：1
|
作者：
Koops, KR
Banning, R
Scholte, PMLO
Heerens, WC
Adriaens, JMTA
de Koning, WL
机构：
[1] Delft Univ Technol, Fac Appl Phys, Delft Inst Microelect & Submicron Technol, NL-2628 CJ Delft, Netherlands
[2] Delft Univ Technol, Fac Tech Math & Comp Sci, Math Syst Theory Grp, NL-2600 AA Delft, Netherlands
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / Suppl 1期
关键词：
Translation Stage; Metrological Application;
D O I：
10.1007/s003390051256
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The nonlinear and hysteretic behavior of piezo actuators used in scanning probe techniques limits the accuracy of the quantitative interpretation of the measurements. In this paper we present the design of a novel ultra-high vacuum (UHV) compatible scanning tunneling microscope (STM) that is equipped with a newly developed capacitive translation sensor. The sensor has been configured to measure translations in the lateral as well as in the perpendicular direction with sub-Angstrom resolution. In combination with a model-based digital feedback system, accurate probe positioning and control will be possible, making this instrument suitable for metrological purposes, nanolithography and atomic manipulation.
引用
收藏
页码：S857 / S860
页数：4
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