Bromine Etching of Patterned YBa2Cu3O6+x, Nanoscale Thin Films for High-Temperature Superconducting Devices

被引：0

作者：

Vinay, Miranda L. ^{[1
]}

LeFebvre, Jay C. ^{[1
]}

Cai, Han ^{[1
]}

Forman, Joseph ^{[1
]}

Cybart, Shane ^{[1
]}

机构：

[1] Univ Calif Riverside, Dept Elect & Comp Engn, Riverside, CA 92521 USA

来源：

ACS APPLIED NANO MATERIALS | 2021年 / 4卷 / 12期

基金：

美国国家科学基金会;

关键词：

YBCO; superconductor; bromine; etching; nanoscale devices; SURFACE PASSIVATION;

D O I：

10.1021/acsanm.1c03098

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Cuprate high-temperature superconducting (HTS) thin films like YBa2Cu3O6+x (YBCO) are subject to reduction reactions with CO2 and H2O. This poses a challenge for processing and storing nanoscale devices made from these films. A 1% bromine-ethanol etchant solution was investigated as a facile processing method for thin 50 nm films of patterned YBCO. Raman scattering, EDS, AFM, and HIM imaging show changes in the surface morphology and composition. RT measurements show electrical changes to a depth of similar to 3 nm after bromination and a slight reduction in T-c (86.5 to 86.4 K). We conclude that bromination of YBCO has minimal electrical consequences.

引用

页码：12926 / 12931

页数：6

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