Investigation of absorption mechanisms in helicon discharges in conducting waveguides

被引:20
作者
Ganguli, A. [1 ]
Sahu, B. B. [2 ]
Tarey, R. D. [3 ]
机构
[1] Indian Inst Technol, Ctr Energy Studies, New Delhi 110016, India
[2] Dronacharya Coll Engn, Dept Appl Sci & Humanities, Gurgaon 123506, India
[3] Indian Inst Technol, Dept Phys, New Delhi 110016, India
关键词
PLASMA SOURCE; GENERALIZED THEORY; MIRROR MACHINE; EXCITATION; ANTENNA; MODES; POWER; PROPAGATION; FREQUENCY;
D O I
10.1088/0963-0252/20/1/015021
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
This paper investigates the mechanisms by which the helicon and associated Trivelpiece-Gould waves are absorbed in helicon discharges produced in conducting chamber; the experiments were based on a recent theory of damping and absorption of helicon modes in conducting waveguides (Ganguli et al 2007 Phys. Plasmas 14 113503). In particular, it was also planned to investigate the manner in which the absorbed energy is utilized for the production of warm electrons that are needed for ionization because helicon discharges are high density, low T-e discharges and the tail of the bulk electron population may not have sufficient high-energy electrons. To this end, two separate regimes were considered. The first was a low pressure (approximate to 0.2-0.3 mTorr), low magnetic field (approximate to 16-20 G) regime where both wave absorption and warm electron production are shown to proceed through Landau damping. The second was a moderate pressure (approximate to 10 mTorr), moderate magnetic field (approximate to 60-65 G) regime, where both power absorption (which is collisional) and warm electron production proceed via high-energy electrons produced by acceleration of bulk electrons (from neighboring regions) across large potential gradients.
引用
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页数:11
相关论文
共 55 条
[1]  
AKHTAR MK, 1996, THESIS IIT NEW DELHI
[2]   The role of Trivelpiece-Gould waves in antenna coupling to helicon waves [J].
Arnush, D .
PHYSICS OF PLASMAS, 2000, 7 (07) :3042-3050
[3]   Generalized theory of helicon waves. II. Excitation and absorption [J].
Arnush, D ;
Chen, FF .
PHYSICS OF PLASMAS, 1998, 5 (05) :1239-1254
[4]   Evidence for Trivelpiece-Gould modes in a Helicon discharge [J].
Blackwell, DD ;
Madziwa, TG ;
Arnush, D ;
Chen, FF .
PHYSICAL REVIEW LETTERS, 2002, 88 (14) :4-145002
[5]   Power coupling to helicon and Trivelpiece-Gould modes in helicon sources [J].
Borg, GG ;
Boswell, RW .
PHYSICS OF PLASMAS, 1998, 5 (03) :564-571
[6]  
Boswell R. W., 1970, Physics Letters A, V33, P457, DOI 10.1016/0375-9601(70)90606-7
[7]   PULSED HIGH-RATE PLASMA-ETCHING WITH VARIABLE SI/SIO2 SELECTIVITY AND VARIABLE SI ETCH PROFILES [J].
BOSWELL, RW ;
HENRY, D .
APPLIED PHYSICS LETTERS, 1985, 47 (10) :1095-1097
[8]  
BOSWELL RW, 1984, PLASMA PHYS CONTR F, V26, P1147, DOI 10.1088/0741-3335/26/10/001
[9]  
Brown S.C., 1967, Basic data of plasma physics, 1966, V2nd
[10]   EXPERIMENTS ON HELICON PLASMA SOURCES [J].
CHEN, FF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :1389-1401