共 50 条
- [35] Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2024, 42 (06):
- [39] Surface reactions for area-selective atomic layer deposition and thermal atomic layer etching of metals and dielectrics ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255
- [40] Blocking the lateral film growth at the nanoscale in area-selective atomic layer deposition Journal of the American Chemical Society, 2008, 130 (34): : 11252 - 11253