共 50 条
- [6] Area-selective atomic layer deposition of palladium JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2024, 42 (02):
- [7] Approaches and opportunities for area-selective atomic layer deposition 2018 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2018,
- [10] Area-selective atomic layer deposition of molybdenum oxide JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (04):