Features of dislocation images reconstructed from step-scanned white X-ray section topographs

We have observed dislocations in a CZ-silicon crystal using step-scanning white X-ray section topography and examined the feature of the dislocation images reconstructed by stacking 200 shots of section topographs. These topographs were obtained from symmetric 004-reflection in the Laue case using 20, 30, and 60 keV X-rays. Direct images, intermediary images, and dynamical images of dislocations were observed in a tomogram, i.e., a sliced image obtained from the stacked section topographs, and the contrast of the dynamical images was reduced with increasing X-ray energy. The stacked section topographs provided three-dimensional images of the dislocations based on the direct images, and the sliced image enabled us to observe the dislocations separately in a highly dislocated region of the CZ-silicon crystal. (c) 2007 WILEY-NCH Verlag GmbH & Co. KGaA, Weinheim.