Langmuir probe measurement of plasma splitting during pulsed laser deposition

被引:10
|
作者
Wild, J
Kudrna, P
Gronych, T
Broz, J
Zelinger, Z
Kubát, P
Civis, S
机构
[1] Charles Univ, Fac Math & Phys, CR-18000 Prague 8, Czech Republic
[2] Acad Sci Czech Republ, J Heyrovsky Inst Phys Chem, CR-18223 Prague, Czech Republic
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2001年 / 72卷 / 02期
关键词
D O I
10.1063/1.1342031
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The properties of plasma formed during pulsed laser deposition from a Bi-Sr-Ca-Cu-O target were measured using a Langmuir probe in the electron accelerating region "Plasma splitting" was observed at pressures in the range of 1-5 Pa and distances of the probe from the target of 3-14 mm. (C) 2001 American Institute of Physics.
引用
收藏
页码:1597 / 1599
页数:3
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