Diamond field-emission triode with low gate turn-on voltage and high gain

被引:17
作者
Wisitora-at, A [1 ]
Kang, WP [1 ]
Davidson, JL [1 ]
Kerns, DV [1 ]
Fisher, TS [1 ]
机构
[1] Vanderbilt Univ, Dept Elect Engn & Comp Sci, Nashville, TN 37235 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 01期
关键词
D O I
10.1116/1.1516186
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A diamond field-emission triode with low gate turn-on voltage of 10 V and high gain factor of 250 is reported. The gated diamond triode was fabricated with a, self-aligning gate technique from a silicon-on-insulator wafer. I-a - V-g plot of emission characteristics from four tips shows a very low gate turn-on voltage of 10 V and high emission current of 4 muA at gate voltage of 20 V. I-a - V-a plots of emission characteristics demonstrate the desired saturation behavior of field-emission transistor with a high voltage gain of 250. The low turn-on gate voltage and high gain factor ate comparable to solid-state metal-oxide-semiconductor field-effect transistor devices, confirming the diamond field-emission. triode has significant. potential for integrated circuit-compatible vacuum microelectronic applications. (C) 2003 American Vacuum Society.
引用
收藏
页码:614 / 617
页数:4
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