Locally grown SnO2 NWs as low power ammonia sensor

被引：4

作者：

Sama, Jordi ^{[1
,2
]}

Barth, Sven ^{[3
]}

Jimenez-Diaz, Roman ^{[1
,2
]}

Prades, Juan-Daniel ^{[1
,2
]}

Casals, Olga ^{[1
,2
]}

Gracia, Isabel ^{[4
]}

Cane, Carles ^{[4
]}

Romano-Rodriguez, Albert ^{[1
,2
]}

机构：

[1] UB, MIND Dept Elecdtron, C Marti & Franques 1, E-08028 Barcelona, Spain

[2] Inst Nanosci & Nanotechnol IN2UB, E-08028 Barcelona, Spain

[3] Techn Univ Vienna TUW, Inst Mat Chem, A-1060 Vienna, Austria

[4] CSIC, IMB CNM, E-08193 Bellaterra, Spain

来源：

EUROSENSORS 2015 | 2015年 / 120卷

关键词：

Nanowires; Metal-oxide; Gas-sensor; Micromembrane; Low-Power consumption; TIN OXIDE;

D O I：

10.1016/j.proeng.2015.08.614

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8h. (C) 2015 The Authors. Published by Elsevier Ltd.

引用

页码：215 / 219

页数：5

共 7 条

[1] Synthesis and applications of one-dimensional semiconductors
Barth, Sven
Hernandez-Ramirez, Francisco
Holmes, Justin D.
Romano-Rodriguez, Albert
[J]. PROGRESS IN MATERIALS SCIENCE, 2010, 55 (06) : 563 - 627
[2] OXYGEN-CHEMISORPTION ON TIN OXIDE - CORRELATION BETWEEN ELECTRICAL-CONDUCTIVITY AND ELECTRON-PARAMAGNETIC-RES MEASUREMENTS
CHANG, SC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 366 - 369
[3] Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
Forleo, A.
Francioso, L.
Capone, S.
Casino, F.
Siciliano, P.
Tan, O. K.
Hui, H.
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2011, 154 (02): : 283 - 287
[4] Ammonia sensors based on metal oxide nanostructures
Rout, Chandra Sekhar
Hegde, Manu
Govindaraj, A.
Rrao, C. N.
[J]. NANOTECHNOLOGY, 2007, 18 (20)
[5] Services H., 2007, NIOSH POCK GUID CHEM
[6] Interaction Mechanisms of Ammonia and Tin Oxide: A Combined Analysis Using Single Nanowire Devices and DFT Calculations
Shao, Feng
Hoffmann, Martin W. G.
Daniel Prades, Joan
Ramon Morante, Joan
Lopez, Nuria
Hernandez-Ramirez, Francisco
[J]. JOURNAL OF PHYSICAL CHEMISTRY C, 2013, 117 (07) : 3520 - 3526
[7] VAPOR-LIQUID-SOLID MECHANISM OF SINGLE CRYSTAL GROWTH ( NEW METHOD GROWTH CATALYSIS FROM IMPURITY WHISKER EPITAXIAL + LARGE CRYSTALS SI E )
WAGNER, RS
ELLIS, WC
[J]. APPLIED PHYSICS LETTERS, 1964, 4 (05) : 89 - &

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