Sol-gel-derived pyroelectric barium strontium titanate thin films for infrared detector applications

Quality pyroelectric Ba0.8Sr0.2TiO3 films have been successfully fabricated by a sol-gel processing using a highly diluted precursor solution. The remnant polarization of the films decreases with the temperature increasing, which results in a large pyroelectric coefficient at room temperature. Infrared response measured using a 500-K chopped blackbody at room temperature exhibits a typical pyroelectric response waveform. Frequency dependence of the infrared response measurement for a pixel with area of 2.5 x 10(-3) cm(2) showed that the maximum response output voltage of 3.2 mV was obtained at 6 Hz, Better infrared response can be expected by the improvement in thermal isolation of the pixels and electrode materials.