Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction

被引：18
作者：
Minami, Kosuke [1 ]
Imamura, Gaku [2 ,3 ]
Tamura, Ryo [2 ,4 ,5 ]
Shiba, Kota [1 ]
Yoshikawa, Genki [1 ,6 ]
机构：
[1] Natl Inst Mat Sci NIMS, Ctr Funct Sensor & Actuator CFSN, Funct Mat Res Ctr, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[2] Natl Inst Mat Sci NIMS, Int Ctr Mat Nanoarchitecton MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[3] Osaka Univ, Grad Sch Informat Sci & Technol, 1-2 Yamadaoka, Suita, Osaka 5650871, Japan
[4] Natl Inst Mat Sci, Res & Serv Div Mat Data & Integrated Syst MaDIS, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[5] Univ Tokyo, Grad Sch Frontier Sci, 5-1-5 Kashiwanoha, Kashiwa, Chiba 2778568, Japan
[6] Univ Tsukuba, Grad Sch Pure & Appl Sci, Mat Sci & Engn, 1-1-1 Tennodai, Tsukuba, Ibaraki 3058571, Japan
来源：
BIOSENSORS-BASEL | 2022年 / 12卷 / 09期
关键词：
Membrane-type Surface stress Sensor (MSS); nanomechanical sensors; static mode operation; artificial olfaction; machine learning; ATOMIC-FORCE MICROSCOPE; GRAPHENE-OXIDE SHEETS; PIEZORESISTIVE MICROCANTILEVER; INDUCED DEFLECTIONS; MASS-SPECTROMETRY; ELECTRONIC NOSES; CANTILEVER PLATES; COATED SENSORS; AIR-QUALITY; LOW-COST;
D O I：
10.3390/bios12090762
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Nanomechanical sensors have gained significant attention as powerful tools for detecting, distinguishing, and identifying target analytes, especially odors that are composed of a complex mixture of gaseous molecules. Nanomechanical sensors and their arrays are a promising platform for artificial olfaction in combination with data processing technologies, including machine learning techniques. This paper reviews the background of nanomechanical sensors, especially conventional cantilever-type sensors. Then, we focus on one of the optimized structures for static mode operation, a nanomechanical Membrane-type Surface stress Sensor (MSS), and discuss recent advances in MSS and their applications towards artificial olfaction.
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页数：34
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