Stretchable spin valve with strain-engineered wrinkles grown on elastomeric polydimethylsiloxane

被引:15
作者
Cheng, Wenjuan [1 ]
Zhou, Zheng [2 ,3 ]
Pan, Minjie [2 ,3 ]
Yang, Huali [2 ,3 ]
Xie, Yali [2 ,3 ]
Wang, Baomin [2 ,3 ]
Zhan, Qingfeng [1 ,2 ,3 ]
Li, Run-Wei [2 ,3 ]
机构
[1] East China Normal Univ, Sch Phys & Mat Sci, State Key Lab Precis Spect, Shanghai 200241, Peoples R China
[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, CAS Key Lab Magnet Mat & Devices, Ningbo 315201, Zhejiang, Peoples R China
[3] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Zhejiang Prov Key Lab Magnet Mat & Applicat Techn, Ningbo 315201, Zhejiang, Peoples R China
基金
中国国家自然科学基金;
关键词
stretchable magnetic sensor; giant magnetoresistance; spin valve; strain-engineered wrinkles; THIN-FILMS; METAL-FILMS; INTERCONNECTS; PATTERNS; DEVICES;
D O I
10.1088/1361-6463/aaf7df
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electronics of tomorrow will be flexible, stretchable, light-weighted, wearable, and even implantable. Here, we fabricated stretchable spin-valve magnetic field sensors on the elastomeric poly(dimethylsiloxane) (PDMS) membranes with pre-strain induced wrinkles. Two in-plane patterns (linear and serpentine) were fabricated by shadow mask to investigate the shape effect on the stretchability. The linearly patterned spin valve fabricated under 50% tensile pre-strain realizes a nearly constant giant magnetoresistance (GMR) ratio of 6.3% and magnetic field sensitivity of 0.26%/Oe when repeatedly stretched up to 50%. In contrast, the serpentine spin valve grown on a pre-strained substrate experience serious cracks when releasing the pre-strain due to the Poisson effect. Nevertheless, the serpentine spin valve grown on a freestanding PDMS, i.e. without a growth pre-strain, show stable GMR performance when tensile strain up to 10% was applied. Our investigation indicates that both the out-of-plane wrinkles and the in-plane patterns are important to determine the ultra-stretchability of the shapeable magnetoelectronic devices.
引用
收藏
页数:7
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