Surfactant effect of gallium during molecular-beam epitaxy of GaN on AlN (0001)
被引:127
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作者:
Mula, G
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机构:CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
Mula, G
Adelmann, C
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机构:CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
Adelmann, C
Moehl, S
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机构:CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
Moehl, S
Oullier, J
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机构:CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
Oullier, J
Daudin, B
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机构:CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
Daudin, B
机构:
[1] CEA, Dept Rech Fondamentale Mat Condensee, Ser Mat & Microstruct, F-38054 Grenoble 9, France
[2] Univ Cagliari, Dipartimento Fis, I-09042 Monserrato, CA, Italy
[3] Univ Cagliari, Ist Nazl Fis Mat, I-09042 Monserrato, CA, Italy
来源:
PHYSICAL REVIEW B
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2001年
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64卷
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19期
关键词:
D O I:
10.1103/PhysRevB.64.195406
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
We study the adsorption of Ga on (0001) GaN surfaces by reflection high-energy electron diffraction. It is shown that a dynamically stable Ga bilayer can be formed on the GaN surface for appropriate Ga fluxes and substrate temperatures. The influence of the presence of this Ga film on the growth mode of GaN on AlN(0001) by plasma-assisted molecular-beam epitaxy is studied. It is demonstrated that under nearly stoichiometric and N-rich conditions, the GaN layer relaxes elastically during the first stages of epitaxy. At high temperatures the growth follows a Stranski-Krastanov mode, whereas at lower temperatures kinetically formed flat platelets are observed. Under Ga-rich conditions-where a Ga bilayer is rapidly formed due to excess Ga accumulating on the surface-the growth follows a Frank-van der Merwe layer-by-layer mode at any growth temperature and no initial elastic relaxation occurs. Hence, it is concluded that excess Ga acts as a surfactant, effectively suppressing both Stranski-Krastanov islanding and platelet formation. It is further demonstrated that the Stranski-Krastanov transition is in competition with elastic relaxation by platelets, and it is only observed when relaxation by platelets is inefficient. As a result, a growth mode phase diagram is outlined for the growth of GaN on AlN(0001).
机构:
Natl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, JapanNatl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, Japan
Jeganathan, K
Shimizu, M
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Natl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, JapanNatl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, Japan
Shimizu, M
Okumura, H
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机构:
Natl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, JapanNatl Inst Adv Ind Sci & Technol, Power Elect Res Ctr, Tsukuba, Ibaraki 3058568, Japan