Particulate Mass Sensing with Piezoelectric Bulk Acoustic Mode Resonators

被引:0
|
作者
Zielinski, Arthur T. [1 ]
Kalberer, Markus [1 ]
Jones, Roderic L. [1 ]
Prasad, Abhinav [2 ]
Seshia, Ashwin A. [2 ]
机构
[1] Univ Cambridge, Dept Chem, Cambridge, England
[2] Univ Cambridge, Dept Engn, Cambridge, England
来源
2016 IEEE International Frequency Control Symposium (IFCS) | 2016年
关键词
MEMS resonators; particle collection; impactor; piezoelectric; square extensional mode; ORGANIC AEROSOL-PARTICLES;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Current portable particle detection instruments typically rely on optical methods which are limited to 100 nm diameter particles. Microfabricated bulk acoustic resonators, when used as mass balances, could take particle detection below this limit. This study examines the collection of particles onto piezoelectric bulk acoustic mode resonators from gaseous flow using classical impaction. Collection of both polystyrene latex alpha-pinene secondary organic aerosol particles was examined in terms of frequency shift and collection efficiency. A new experimental setup was introduced which allows for adjusting major impactor, resonator, and aerosol properties. Preliminary results show the setup works for both particles while the saturation limit was not reached within an hour despite highly elevated particle concentrations.
引用
收藏
页码:558 / 563
页数:6
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