The change in surface composition and structure of a rutile TiO2(110) surface during thermal annealing in an ultrahigh vacuum was studied by coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis. When the clean TiO2(110) surface with a 1x1 bridging-oxygen-rows structure was obtained by annealing at 730 degreesC, about one monolayer of hydrogen atoms still resided on the surface. These hydrogen atoms were assigned to surface hydroxyls as an ingredient of the TiO2(110)1x1 structure, which was formed in the self-restoration process of surface oxygen vacancy defects by dissociative adsorption of water molecules during thermal annealing. (C) 2001 American Institute of Physics.