FAST MECHANICAL BIOSENSING IN LIQUID USING MEMS FABRY-PEROT INTERFEROMETRIC SURFACE-STRESS SENSOR

被引：0

作者：

Masuya, Y. ^{[1
]}

Ozawa, R. ^{[1
]}

Ishida, M. ^{[1
,2
]}

Sawada, K. ^{[1
,2
,3
]}

Takahashi, K. ^{[1
,3
]}

机构：

[1] Toyohashi Univ Technol, Toyohashi, Aichi, Japan

[2] JST CREST, Tokyo, Japan

[3] Elect Inspired Interdisciplinary Res Inst EIIRIS, Toyohashi, Aichi, Japan

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Fabry-Perot interferometer; microelectromechanical systems (MEMS); surface-stress; photodiode; label-free biosensing; microfluidic channel;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We developed an optical interferometeric surface-stress sensor which utilizes the nonlinear optical transmittance change in the Fabry-Perot interference to enhance the sensitivity of the surface-stress, integrated with a microfluidic channel for fast biosensing. A 30-mu m-thick photosensitive dry film resist was laminated on the sensor, followed by a standard photolithography to form microfluidic channel. During the liquid supplying to the sensor, no liquid leakage into nano cavity was observed because output photocurrent shows constant. Photocurrent change of 8 nA was obtained when an anti-bovine serum albumin (BSA) with concentration of 100 ng/ml was injected with flow rate of 1 mu l/min. Response time was successfully improved to be several tens of seconds.

引用

页码：1613 / 1616

页数：4