FAST MECHANICAL BIOSENSING IN LIQUID USING MEMS FABRY-PEROT INTERFEROMETRIC SURFACE-STRESS SENSOR

被引：0
作者：
Masuya, Y. [1 ]
Ozawa, R. [1 ]
Ishida, M. [1 ,2 ]
Sawada, K. [1 ,2 ,3 ]
Takahashi, K. [1 ,3 ]
机构：
[1] Toyohashi Univ Technol, Toyohashi, Aichi, Japan
[2] JST CREST, Tokyo, Japan
[3] Elect Inspired Interdisciplinary Res Inst EIIRIS, Toyohashi, Aichi, Japan
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
关键词：
Fabry-Perot interferometer; microelectromechanical systems (MEMS); surface-stress; photodiode; label-free biosensing; microfluidic channel;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We developed an optical interferometeric surface-stress sensor which utilizes the nonlinear optical transmittance change in the Fabry-Perot interference to enhance the sensitivity of the surface-stress, integrated with a microfluidic channel for fast biosensing. A 30-mu m-thick photosensitive dry film resist was laminated on the sensor, followed by a standard photolithography to form microfluidic channel. During the liquid supplying to the sensor, no liquid leakage into nano cavity was observed because output photocurrent shows constant. Photocurrent change of 8 nA was obtained when an anti-bovine serum albumin (BSA) with concentration of 100 ng/ml was injected with flow rate of 1 mu l/min. Response time was successfully improved to be several tens of seconds.
引用
收藏
页码：1613 / 1616
页数：4
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