SPATIALLY-RESOLVED 3ω THERMAL FLOW SENSING FOR MICROFLUIDICS AND BIOLOGY

被引：0

作者：

Meffan, Claude ^{[1
]}

Cheradame, Nicolas ^{[1
]}

Sellier, Mathieu ^{[1
]}

Calius, Emilio ^{[2
]}

Nock, Volker ^{[1
]}

机构：

[1] Univ Canterbury, Christchurch, New Zealand

[2] Callaghan Innovat Ltd, Wellington, New Zealand

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

关键词：

Flow Sensing; 3 omega Method; Thermal Penetration Depth; Polydimethylsiloxane Microfluidics; SPECTROSCOPY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports an alternating current (AC) thermal flow sensor, based on the 3 omega method, capable of measuring fluid flow in stacked microfluidic channels and through separating membranes. The measurement concept is tested in a triple-layer polydimethylsiloxane (PDMS) device containing two parallel channels separated by a membrane. A 3 omega element integrated into the bottom channel was used to determine the flow direction and magnitude in both channels. Our results show that the phase of the temperature wave is linked not only to fluid velocity, but the physical dimensions of the channel, thus providing a novel non-contact tool to probe fluid flows.

引用

页码：1917 / 1920

页数：4

共 14 条

[1] WIDE-FREQUENCY SPECIFIC-HEAT SPECTROMETER [J].