Strain, Bubbles, Dirt, and Folds: A Study of Graphene Polymer-Assisted Transfer

被引:101
作者
Hallam, Toby [1 ]
Berner, Nina C. [1 ]
Yim, Chanyoung [1 ]
Duesberg, Georg S. [1 ,2 ]
机构
[1] Univ Dublin Trinity Coll, Ctr Res Adapt Nanostruct & Nanodevices, Dublin 2, Ireland
[2] Univ Dublin Trinity Coll, Sch Chem, Dublin 2, Ireland
关键词
CHEMICAL-VAPOR-DEPOSITION; HIGH-QUALITY; SCATTERING; FILMS;
D O I
10.1002/admi.201400115
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
For many applications, in particular in electronics, where chemical vapor deposited (CVD) graphene is used, it needs to be transferred from the growth substrate to the device substrate, generally employing a polymer film as a support layer. This process step is crucial for the overall integrity and electronic performance of the graphene. In this work we will investigate the effects of the transfer using various polymers with atomic force, Raman spectroscopy and X-ray photoelectron spectroscopy combined with field dependent transport measurements to build up a complete picture regarding the morphology, structural integrity and electrical performance of CVD graphene. Further, we introduce nitrocellulose based polymer alternatives to the most commonly used poly(methyl methacrylate) resist, outperforming the latter in most respects.
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页数:7
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