Ozone production efficiency in atmospheric dielectric barrier discharge of oxygen/rare-gas mixture

被引:3
|
作者
Kimura, T [1 ]
Yoshigoe, T [1 ]
Oda, A [1 ]
机构
[1] Nagoya Inst Technol, Dept Syst Engn, Showa Ku, Nagoya, Aichi 4668555, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 08期
关键词
ozone; barrier discharge; production efficiency; oxygen; rare gas;
D O I
10.1143/JJAP.42.5313
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the rare-gas-content dependence of ozone production efficiency for various gaps in oxygen/rare-gas-mixture barrier discharges. The production efficiency measured for a discharge gap shorter than 1.0 mm decreased with the increase in rare-gas content, while the efficiencies in the cases of Ne and Ar mixtures for a gap of 3 mm gradually increased until the content reached 80%.
引用
收藏
页码:5313 / 5314
页数:2
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