Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

被引：86

作者：

Lee, J. E. -Y. ^{[1
]}

Bahreyni, B. ^{[1
]}

Zhu, Y. ^{[1
]}

Seshia, A. A. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 23期

关键词：

D O I：

10.1063/1.2822405

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg/cm(2) is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 10(6). The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm(2)/mu g. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. (c) 2007 American Institute of Physics.

引用

页数：3