Role of transverse magnetic field in the capacitive discharge

被引：26

作者：

You, S. J. ^{[1
]}

Hai, T. T. ^{[1
]}

Park, M. ^{[1
]}

Kim, D. W. ^{[1
]}

Kim, J. H. ^{[1
]}

Seong, D. J. ^{[1
]}

Shin, Y. H. ^{[1
]}

Lee, S. H. ^{[3
]}

Park, G. Y. ^{[3
]}

Lee, J. K. ^{[3
]}

Chang, H. Y. ^{[2
]}

机构：

[1] Korea Res Inst Stand & Sci, Ctr Vacuum Technol, Taejon 305306, South Korea

[2] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea

[3] Pohang Univ Sci & Technol, Dept Elect & Elect Engn, Pohang 790784, South Korea

来源：

THIN SOLID FILMS | 2011年 / 519卷 / 20期

关键词：

Capacitive; Discharge; Magnetic field; Langmuir probe; ELECTRON-ENERGY DISTRIBUTION; HEATING-MODE TRANSITION; POWER DISSIPATION; RF; KINETICS; TRANSPORT; SHEATHS;

D O I：

10.1016/j.tsf.2011.01.384

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of magnetic field on the plasma which is one of the oldest problems in plasma physics and remains of great interest in plasma fusion studies, recently has been an important problem in many plasma discharge used in processing semiconductor materials, because the application of a magnetic field results in enhancement of some desirable features of specific plasma sources. In this paper, the transverse magnetic field effects on the radio frequency capacitive discharge of low and intermediate gas pressure (1.33 Pa similar to 40.00 Pa) are reviewed to clarify the role of the magnetic field in the capacitive discharge. Lots of physical phenomena induced by transverse magnetic field, such as power dissipation mode transition, low energy electron heating/cooling, axial variation of electron density and temperature and E x B drift are presented and analyzed. This article is expected to provide qualitative insight to understand the role of magnetic field in the capacitive discharges. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：6981 / 6989

页数：9

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