Mems-based gyroscope: Design, analysis and simulation

被引：0

作者：

Sharaf, Abdelhameed ^{[1
]}

Sedky, Sherif ^{[1
]}

Ashour, Mahmoud A. ^{[1
]}

Habib, S. E. -D. ^{[1
]}

机构：

[1] EAEA, NCRRT, Nasr City, Cairo, Egypt

来源：

PROCEEDINGS OF THE ASME 2ND MULTIFUNCTIONAL NANOCOMPOSITES AND NANOMATERIALS CONFERENCE 2008: DESIGN AND MODELING OF NANOCOMPOSITES AND NANOMATERIALS - FABRICATION OF NANOCOMPOSITES, MATERIALS AND DEVICES - MULTIFUNCTIONALITIES IN NANOCOMPOSITES AND NANOMATERIALS - NANOMATERIALS FOR BIOMEDICAL APPLICATIONS | 2008年

关键词：

symmetrical decoupled gyroscope; MEMS; finite element analysis;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper introduces an efficient design for a symmetrical and decoupled micromachined gyroscope. The angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense modes close to each other using symmetric suspensions; whereas, the undesired mechanical coupling between the two modes during matched mode operation is reduced by the fully decoupled gyroscope flexures. Reduced mechanical coupling results in a stable zero-rate output, providing excellent bias stability. The design utilizes efficiently the silicon area, increases the driving electrostatic force, and increases the sensing capacitance.

引用

页码：27 / 31

页数：5

共 18 条

[1] Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement [J].