The electron bounce resonance in a low-pressure solenoidal inductive discharge

The electron energy distribution functions (EEDFs) are measured by a rf compensated Langmuir probe in a solenoidal inductive reactor at various frequencies and at 2 mTorr of argon. The frequency dependence of the electron energy distribution function is clearly observed. The energy diffusion coefficients against the applied frequencies are calculated from the nonlocal heating theory. It is found that the bounce resonance electrons determine the energy diffusion coefficient shape and the electron energy distribution function at the bounce resonance energy in the energy diffusion coefficient begins to flatten. The exact bounce resonance condition in solenoidal inductive discharge is presented. It is reported that the frequency dependence of the EEDFs is mainly due to the electron bounce resonance in a finite-size solenoidal inductive discharge. (C) 2001 American Institute of Physics.