Lifetime improvement of Si field emitter arrays by HfC coating

被引：0
作者：
Nagao, M [1 ]
Sato, T [1 ]
Nicolaescu, D [1 ]
Matsukawa, T [1 ]
Kanemaru, S [1 ]
Itoh, J [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
来源：
TECHNICAL DIGEST OF THE 16TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE | 2003年
关键词：
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：33 / 34
页数：2
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