Device optimization of CO2 gas sensor using planar technology

A planar type Li+ ion based potentiometric CO2 micro gas sensor of size 2 x 3 mm has been fabricated on alumina substrate by combining thin and thick film technology. The heater, electrodes and electrolyte were deposited by thin film deposition technique and the sensing and reference electrodes were printed by silk screen printing technology. The optimal thickness and sintering temperature of electrolyte are 1.2 mu m and 775 degrees C. The sensor with Li2CO3 and 20 mol% BaCO3 not only exhibits a good Nernstian behavior but also consistent results over a long time at 450 degrees C in dry as well as 70% RH humidity condition between 160-5000 ppm CO2 concentrations. The spreading effect of the sensing and reference materials was controlled by the addition of Al2O3:B2O3 (1:2 mol%) glass.