Microstructure, mechanical and tribological properties of Ti-B-C-N films prepared by reactive magnetron sputtering

被引：22

作者：

Chen, Xiangyang ^{[1
]}

Wang, Zenghui ^{[1
]}

Ma, Shengli ^{[1
]}

Ji, Vincent ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China

[2] Univ Paris 11, ICMMO LEMHE, F-91405 Orsay, France

来源：

关键词：

Ti-B-C-N films; Sputtering; Tribology; Amorphous carbon; THERMAL-STABILITY; HARD; COATINGS;

D O I：

10.1016/j.diamond.2010.07.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Quaternary Ti-B-C-N thin films are deposited on high-speed steel substrates by the reactive magnetron sputtering (RMS) technique. The microstructure, mechanical and tribological properties of Ti-B-C-N films with different carbon contents (from 28.9 at% to 54.2 at.%) are explored systematically. The microstructure of Ti-BC-N films deposited by RMS is consisted mainly of Ti(C, N) nano-crystals embedded into an amorphous matrix of a-C/a-CN/a-BN/a-BC. As the carbon content increases, the crystalline size of the films diminishes, but the hardness linearly increases from 14 GPa to 26 GPa. The friction coefficient of the films sliding against steel GCr15 balls in air decreases with the increase of carbon content, which shows that Ti-B-C-N films with both higher hardness and lower friction coefficient can be obtained by means of increasing the carbon concentration in the films. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：1336 / 1340

页数：5

共 19 条

[1] Coefficients of friction of TiN coatings with preferred grain orientations under dry condition [J].

Azushima, Akira ;

Tanno, Yasuo ;

Iwata, Hiroyuki ;

Aoki, Kohshiro .

WEAR, 2008, 265 (7-8) :1017-1022

[2] A study of biotribological behavior of DLC coatings and its influence to human serum albumin [J].

Hang, Ruiqiang ;

Qi, Ying .

[3] Study of thermal stability of some hard nitride coatings deposited by reactive magnetron sputtering [J].

Héau, C ;

Fillit, RY ;

Vaux, F ;

Pascaretti, F .

SURFACE & COATINGS TECHNOLOGY, 1999, 120 :200-205

[4] The composite and film hardness of TiN coatings prepared by cathodic arc evaporation [J].

Ichimura, H ;

Rodriguez, FM ;

Rodrigo, A .

SURFACE & COATINGS TECHNOLOGY, 2000, 127 (2-3) :138-143

[5] Syntheses and mechanical properties of Ti-B-C-N coatings by a plasma-enhanced chemical vapor deposition [J].

Kim, Kwang Ho ;

Ok, Jung Tae ;

Abraham, Sudeep ;

Cho, Young-Rae ;

Park, In-Wook ;

Moore, John J. .

SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) :4185-4189

[6] Thermal stability and oxidation resistance of Ti-B-N, Ti-Cr-B-N, Ti-Si-B-N and Ti-Al-Si-B-N films [J].

Kiryukhantsev-Korneev, Ph. V. ;

Shtansky, D. V. ;

Petrzhik, M. I. ;

Levashov, E. A. ;

Mavrin, B. N. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (13) :6143-6147

[7] Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system [J].

Ma, Shengli ;

Xu, Bin ;

Wu, Guizhi ;

Wang, Yanfeng ;

Ma, Fei ;

Ma, Dayan ;

Xu, Kewei ;

Bell, Tom .

SURFACE & COATINGS TECHNOLOGY, 2008, 202 (22-23) :5379-5382

[8] Thermal stability of superhard Ti-B-N coatings [J].

Mayrhofer, P. H. ;

Stoiber, M. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (13) :6148-6153

[9] Microstructure and properties of nanocomposite Ti-B-N and Ti-B-C coatings [J].

Mitterer, C ;

Mayrhofer, PH ;

Beschliesser, M ;

Losbichler, P ;

Warbichler, P ;

Hofer, F ;

Gibson, PN ;

Gissler, W ;

Hruby, H ;

Musil, J ;

Vlcek, J .

SURFACE & COATINGS TECHNOLOGY, 1999, 120 :405-411

[10] Tribological behaviour of homogeneous Ti-B-N, Ti-B-N-C and TiN/h-BN/TiB2 multilayer coatings [J].

Mollart, TP ;

Haupt, J ;

Gilmore, R ;

Gissler, W .

SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3) :231-236

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