Electron transport properties of Al0.3Ga0.7 N/GaN high electron mobility transistor (HEMT)

被引:2
作者
Akpinar, Omer [1 ]
Bilgili, Ahmet Kuersat [2 ]
Ozturk, Mustafa Kemal [1 ]
Ozcelik, Sueleyman [1 ]
机构
[1] Gazi Univ, Photon Res Ctr, TR-06500 Ankara, Turkey
[2] Gazi Univ, Dept Phys, TR-06500 Ankara, Turkey
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2020年 / 126卷 / 08期
关键词
Al; AlGaN; GaN; Hall measurements; Phonon scattering; HEMT; MOMENTUM RELAXATION; ENERGY; BULK;
D O I
10.1007/s00339-020-03810-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, a Al (0.3) Ga (0.7) N/GaN high electron mobility transistor (HEMT) structure is grown on a c-oriented sapphire substrate using a metal organic chemical vapor deposition (MOCVD) system. Resistivity (rho), Hall mobility (mu) and carrier density (n) are measured in 0.01-0.14 T magnetic field range and 25-340 K temperature range. Also, scattering mechanisms effecting electron mobility are discussed. Resistivity analyses are presented by depending on resistivity measurements.
引用
收藏
页数:5
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