ANALYZING THICKNESS SHEAR VIBRATION OF ZNO THIN FILM WITH A VISCOELASTIC LAYER

被引：0

作者：

Fu, Xian ^{[1
]}

Du, Jian-ke ^{[1
]}

Lou, Jia ^{[1
]}

Wang, Ji ^{[1
]}

Ma, Ting-feng ^{[1
]}

Huang, Bin ^{[1
]}

Yi, Li-jun ^{[1
]}

机构：

[1] Ningbo Univ, Sch Mech Engn & Mech, Ningbo 315211, Zhejiang, Peoples R China

来源：

PROCEEDINGS OF THE 2015 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS | 2015年

关键词：

Film Bulk Acoustic Wave Resonators; Viscoelasticity; Thickness shear vibration; Resonant frequency;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

According to the linear piezoelectric theory, the frequency equation of thickness shear vibration is obtained for investigating the ZnO thin film with a layer of viscoelastic media. Fortunately, some useful results are harvested. From these results, we find that the relative resonant frequency significantly increases when the viscous coefficient is in the range of 0-2Ns/m(2). The relation between the relative resonant frequency and the density and thickness of the viscoelastic media also has been discussed. These need to be considered in the design of resonators.

引用

页码：442 / 445

页数：4

共 50 条

[41] Thickness-shear vibration of a Z-strip AT-cut quartz crystal plate with nonuniform electrode pairs
Zhao, Zinan
Qian, Zhenghua
Wang, Bin
FERROELECTRICS, 2017, 506 (01) : 48 - 62
[42] Transmission of shear waves through a self-reinforced layer sandwiched between two inhomogeneous viscoelastic half-spaces
Chaudhary, S
Kaushik, VP
Tomar, SK
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2005, 47 (09) : 1455 - 1472
[43] A geometrically exact viscoplastic membrane-shell with viscoelastic transverse shear resistance avoiding degeneracy in the thin-shell limit. Part I: The viscoelastic membrane-plate
Neff, P
ZEITSCHRIFT FUR ANGEWANDTE MATHEMATIK UND PHYSIK, 2005, 56 (01): : 148 - 182
[44] A geometrically exact viscoplastic membrane-shell with viscoelastic transverse shear resistance avoiding degeneracy in the thin-shell limit.Part I: The viscoelastic membrane-plate
Patrizio Neff
Zeitschrift für angewandte Mathematik und Physik ZAMP, 2005, 56 : 148 - 182
[45] Air-backed al/Zno/Al film bulk acoustic resonator without any support layer
Zhang, H
Kim, ES
PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2002, : 20 - 26
[46] Thickness-Shear Vibration of AT-Cut Quartz Plates Carrying Finite-Size Particles With Rotational Degree of Freedom and Rotatory Inertia
Zhang, Chunli
Liu, Nan
Yang, Jiashi
Chen, Weiqiu
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2011, 58 (03) : 666 - 670
[47] Using thickness-shear mode quartz resonator for characterizing the viscoelastic properties of PDMS during cross-linking, from the liquid to the solid state and at different temperatures
Dalla Monta, Amaury
Razan, Florence
Le Cam, Jean-Benoit
Chagnon, Gregory
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 280 : 107 - 113
[48] Numerical Simulation of the Stress-Strain State of Thin-Layer Rubber-Metal Vibration Absorber Elements Under Nonlinear Deformation
Bulat, A. F.
Dyrda, V. I.
Lysytsya, M. I.
Grebenyuk, S. M.
STRENGTH OF MATERIALS, 2018, 50 (03) : 387 - 395
[49] Numerical Simulation of the Stress-Strain State of Thin-Layer Rubber-Metal Vibration Absorber Elements Under Nonlinear Deformation
A. F. Bulat
V. I. Dyrda
M. I. Lysytsya
S. M. Grebenyuk
Strength of Materials, 2018, 50 : 387 - 395
[50] Analyzing and modeling rheological behavior of liver fibrosis in rats using shear viscoelastic moduli利用剪切黏弹性模量对大鼠肝纤维化流变特性进行分析和建模
Ying Zhu
Yi Zheng
Yuan-yuan Shen
Xin Chen
Xin-yu Zhang
Hao-ming Lin
Yan-rong Guo
Tian-fu Wang
Si-ping Chen
Journal of Zhejiang University SCIENCE B, 2014, 15 : 375 - 381

← 1 2 3 4 5 →