Polymer mems-based microgripper for single cell manipulation

被引：31

作者：

Chronis, N ^{[1
]}

Lee, LP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Dept Bioengn, Berkeley, CA 94720 USA

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the development of a polymer MEMS-based microgripper that can operate in physiological ionic solurtions. The electrothermally activated polymer gripper consists of two 'hot and cold arm' actuators placed antisymmetrically next to each other. The polymer microgripper is fabricated in a standard two-mask surface micromachining process. The high thermal expansion coefficient of the polymer (SU-8) allows the activation of the microgripper with small temperature elevations (20-40 degreesC) at low voltages (1-2 Volts). The developed polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions.

引用

页码：17 / 20

页数：4