VAN LCOS Microdisplays: A Decade of Technological Evolution

被引：25

作者：

Cuypers, Dieter ^{[1
]}

De Smet, Herbert ^{[2
]}

Van Calster, Andre ^{[2
]}

机构：

[1] IMEC, Ctr Microsyst Technol, B-9052 Zwijnaarde, Belgium

[2] Univ Ghent, Dept Elect & Informat Syst, Ctr Microsyst Technol, B-9052 Zwijnaarde, Belgium

来源：

JOURNAL OF DISPLAY TECHNOLOGY | 2011年 / 7卷 / 03期

关键词：

Liquid crystals on silicon (LCOS); microdisplay; vertically aligned nematic (VAN); LIQUID-CRYSTAL ALIGNMENT; ATOMIC-BEAM ALIGNMENT; SURFACE ORIENTATION; COLUMNAR MICROSTRUCTURE; FILMS; ANISOTROPY; PRETILT; GROWTH;

D O I：

10.1109/JDT.2010.2053018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microdisplays of the liquid crystals on silicon (LCOS) type have gone through a rapid evolution during the last decade. We present an overview of how vertically aligned nematic (VAN) LCOS have evolved from an attractive, but notoriously difficult and even infamous technology, to the mainstream microdisplay technology that it is today. At the same time, we highlight a number of remaining issues and concerns, and present some ideas of how to remedy them.

引用

页码：127 / 134

页数：8

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