共 36 条
[21]
Realization of a Compact Optical Interconnect on Silicon by Heterogeneous Integration of III-V
[J].
Spuesens, Thijs
;
Bauwelinck, Johan
;
Regreny, Philippe
;
Van Thourhout, Dries
.
IEEE PHOTONICS TECHNOLOGY LETTERS,
2013, 25 (14)
:1332-1335

Spuesens, Thijs
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium

Bauwelinck, Johan
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium

Regreny, Philippe
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Lyon, Inst Nanotechnol Lyon, Unite Mixte Rech 5270, Ctr Natl Rech Sci,Ecole Cent Lyon, F-69134 Lyon, France Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium

Van Thourhout, Dries
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium
[22]
Towards contact integration for III-V/Silicon heterogeneous Photonics devices
[J].
Ghegin, E.
;
Rodriguez, Ph.
;
Nemouchi, F.
;
Jany, Ch.
;
Brihoum, M.
;
Halimaoui, A.
;
Sagnes, I.
;
Szelag, B.
.
2016 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC),
2016,
:69-71

Ghegin, E.
论文数: 0 引用数: 0
h-index: 0
机构:
STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
CNRS LPN, Route Nozay, F-91460 Marcoussis, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Rodriguez, Ph.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Nemouchi, F.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Jany, Ch.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Brihoum, M.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Halimaoui, A.
论文数: 0 引用数: 0
h-index: 0
机构:
STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Sagnes, I.
论文数: 0 引用数: 0
h-index: 0
机构:
CNRS LPN, Route Nozay, F-91460 Marcoussis, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France

Szelag, B.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Grenoble Alpes, F-38000 Grenoble, France
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France STMicroelectronics, 850 Rue Jean Monnet, F-38926 Crolles, France
[23]
Heterogeneous Integration of III-V on Silicon for System-in-Package Photonic Transceivers
[J].
Fish, Gregory
;
Koch, Brian R.
;
Norberg, Erik J.
;
Roth, Jonathon E.
;
Ramaswamy, Anand
;
Hutchinson, John
;
Shin, Jae-Hyuk
;
Fang, Alexander
.
2016 INTERNATIONAL SEMICONDUCTOR LASER CONFERENCE (ISLC),
2016,

Fish, Gregory
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Koch, Brian R.
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Norberg, Erik J.
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Roth, Jonathon E.
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Ramaswamy, Anand
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Hutchinson, John
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Shin, Jae-Hyuk
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA

Fang, Alexander
论文数: 0 引用数: 0
h-index: 0
机构:
Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA Aurrion Inc, 6868 Cortona Dr, Goleta, CA 93117 USA
[24]
Towards scalable heterogeneous integration of thin-film lithium niobate on silicon photonics using microtransfer printing
[J].
Vanackere, Tom
;
Vandekerckhove, Tom
;
Billet, Maximilien
;
Tan, Ying
;
Niels, Margot
;
Zhai, Tingting
;
Parracino, Antonietta
;
Bonito, Valeria
;
Withouck, Jorik
;
Roelkens, Gunther
;
Van Thourhout, Dries
;
Clemmen, Stephane
;
Kuyken, Bart
.
INTEGRATED PHOTONICS PLATFORMS III,
2024, 13012

Vanackere, Tom
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Libre Bruxelles ULB, OPERA Photon, CP 194-5, B-1050 Brussels, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

论文数: 引用数:
h-index:
机构:

论文数: 引用数:
h-index:
机构:

Tan, Ying
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

Niels, Margot
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

Zhai, Tingting
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

Parracino, Antonietta
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

Bonito, Valeria
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

Withouck, Jorik
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

论文数: 引用数:
h-index:
机构:

论文数: 引用数:
h-index:
机构:

Clemmen, Stephane
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium
Univ Libre Bruxelles ULB, OPERA Photon, CP 194-5, B-1050 Brussels, Belgium
Univ Ghent, Ctr Nano & Biophoton, B-9052 Ghent, Belgium
Univ Libre Bruxelles ULB, Lab Informat Quant, B-1050 Brussels, Belgium Univ Ghent, IMEC, Photon Res Grp, Dept Informat Technol INTEC, B-9052 Ghent, Belgium

论文数: 引用数:
h-index:
机构:
[25]
Integration of 2D materials on a silicon photonics platform for optoelectronics applications
[J].
Youngblood, Nathan
;
Li, Mo
.
NANOPHOTONICS,
2017, 6 (06)
:1205-1218

Youngblood, Nathan
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA

Li, Mo
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA
[26]
A Universal Bonding Strategy for Achieving CMOS-Compatible Silicon Heterogeneous Integration
[J].
Du, Yu
;
Jiang, Heng
;
Zhu, Bingxuan
;
Yan, Han
;
Chai, Yao
;
Tsoi, Chi Chung
;
Zhang, Xuming
;
Wang, Chenxi
.
ADVANCED MATERIALS TECHNOLOGIES,
2025,

Du, Yu
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China
Hong Kong Polytech Univ, Photon Res Inst, Dept Appl Phys, Hong Kong 999077, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Jiang, Heng
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Polytech Univ, Photon Res Inst, Dept Appl Phys, Hong Kong 999077, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Zhu, Bingxuan
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol Shenzhen, Sch Mat Sci & Engn, Sauvage Lab Smart Mat, Shenzhen 518055, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Yan, Han
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Chai, Yao
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Polytech Univ, Photon Res Inst, Dept Appl Phys, Hong Kong 999077, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Tsoi, Chi Chung
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Polytech Univ, Photon Res Inst, Dept Appl Phys, Hong Kong 999077, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Zhang, Xuming
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Polytech Univ, Photon Res Inst, Dept Appl Phys, Hong Kong 999077, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China

Wang, Chenxi
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China Harbin Inst Technol, State Key Lab Precis Welding & Joining Mat & Struc, Harbin 150001, Peoples R China
[27]
Silicon Photonics Technology on 200-mm CMOS Platform for High Integration Applications
[J].
Li, Bin
;
Tang, Bo
;
Zhang, Peng
;
Liu, Daoqun
;
Liu, Ruonan
;
Zhou, Zhangyu
;
Yu, Jinzhong
;
Li, Zhihua
.
OPTOELECTRONIC DEVICES AND INTEGRATION VII,
2018, 10814

Li, Bin
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Tang, Bo
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Zhang, Peng
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Liu, Daoqun
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Liu, Ruonan
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Zhou, Zhangyu
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Yu, Jinzhong
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Li, Zhihua
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[28]
Silicon photonics: Applications, recent results and integration challenges as it relates to CMOS processing; an industry perspective
[J].
Cohen, O
;
Salib, M
;
Morse, M
;
Paniccia, M
.
SEMICONDUCTOR AND ORGANIC OPTOELECTRONIC MATERIALS AND DEVICES,
2005, 5624
:268-272

Cohen, O
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel

Salib, M
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel

Morse, M
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel

Paniccia, M
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel Intel Corp, SBI Pk Har Hotzvim, IL-91031 Jerusalem, Israel
[29]
1.6 Tbps Silicon Photonics Integrated Circuit and 800 Gbps Photonic Engine for Switch Co-Packaging Demonstration
[J].
Fathololoumi, Saeed
;
Hui, David
;
Jadhav, Susheel
;
Chen, Jian
;
Nguyen, Kimchau
;
Sakib, M. N.
;
Li, Z.
;
Mahalingam, Hari
;
Amiralizadeh, Siamak
;
Tang, Nelson N.
;
Potluri, Harinadh
;
Montazeri, Mohammad
;
Frish, Harel
;
Defrees, Reece A.
;
Seibert, Christopher
;
Krichevsky, Alexander
;
Doylend, Jonathan K.
;
Heck, John
;
Venables, R.
;
Dahal, A.
;
Awujoola, A.
;
Vardapetyan, A.
;
Kaur, Guneet
;
Cen, Min
;
Kulkarni, Vishnu
;
Islam, Syed S.
;
Spreitzer, R. L.
;
Garag, S.
;
Alduino, A. C.
;
Chiou, R. K.
;
Kamyab, L.
;
Gupta, S.
;
Xie, B.
;
Appleton, R. S.
;
Hollingsworth, S.
;
McCargar, S.
;
Akulova, Y.
;
Brown, K. M.
;
Jones, R.
;
Zhu, Daniel
;
Liljeberg, Thomas
;
Liao, Ling
.
JOURNAL OF LIGHTWAVE TECHNOLOGY,
2021, 39 (04)
:1155-1161

Fathololoumi, Saeed
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Hui, David
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Jadhav, Susheel
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Chen, Jian
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Nguyen, Kimchau
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Sakib, M. N.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Li, Z.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Mahalingam, Hari
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Amiralizadeh, Siamak
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Tang, Nelson N.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Potluri, Harinadh
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Montazeri, Mohammad
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Frish, Harel
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Defrees, Reece A.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Seibert, Christopher
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Krichevsky, Alexander
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Doylend, Jonathan K.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Heck, John
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Venables, R.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Dahal, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Awujoola, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Vardapetyan, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Kaur, Guneet
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Cen, Min
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Kulkarni, Vishnu
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Islam, Syed S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Spreitzer, R. L.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Garag, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Alduino, A. C.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Chiou, R. K.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Kamyab, L.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Gupta, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Xie, B.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Appleton, R. S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Hollingsworth, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

McCargar, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Akulova, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Brown, K. M.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Jones, R.
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Zhu, Daniel
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Liljeberg, Thomas
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA

Liao, Ling
论文数: 0 引用数: 0
h-index: 0
机构:
Intel Corp, Santa Clara, CA 95054 USA Intel Corp, Santa Clara, CA 95054 USA
[30]
Echelle grating for Silicon Photonics applications: integration of Electron Beam Lithography in the process flow and first results
[J].
Kaschel, Mathias
;
Letzkus, Florian
;
Butschke, Joerg
;
Skwierawski, Piotr
;
Schneider, Marc
;
Weber, Marc
.
SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V,
2016, 9891

Kaschel, Mathias
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany

Letzkus, Florian
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany

Butschke, Joerg
论文数: 0 引用数: 0
h-index: 0
机构:
Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany

Skwierawski, Piotr
论文数: 0 引用数: 0
h-index: 0
机构:
KIT, Kaiserstr 12, D-76131 Karlsruhe, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany

Schneider, Marc
论文数: 0 引用数: 0
h-index: 0
机构:
KIT, Kaiserstr 12, D-76131 Karlsruhe, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany

Weber, Marc
论文数: 0 引用数: 0
h-index: 0
机构:
KIT, Kaiserstr 12, D-76131 Karlsruhe, Germany Inst Mikroelektron Stuttgart IMS CHIPS, Allmandring 30a, D-70569 Stuttgart, Germany