Demonstration of low-loss on-chip integrated plasmonic waveguide based on simple fabrication steps on silicon-on-insulator platform

被引:14
作者
Tobing, Landobasa Y. M. [1 ]
Tjahjana, Liliana [1 ]
Zhang, Dao Hua [1 ]
机构
[1] Nanyang Technol Univ, Nanophoton Lab, Singapore 639798, Singapore
基金
新加坡国家研究基金会;
关键词
DEVICES;
D O I
10.1063/1.4739523
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the experimental realization of a robust silicon-based plasmonic waveguide structure which can theoretically provide sub-wavelength confinement for E-x- and E-y-polarized surface plasmon polariton modes. Our waveguides exhibit propagation loss as low as 0.2 dB/mu m with similar to 50% coupling efficiency. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4739523]
引用
收藏
页数:4
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